X3502-64171

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<5 x 10^-10 mbar, Compression Ratio Ar=>1 x 10⁹, Compression Ratio H2=1 x 10⁴, Compression Ratio He=2 x 10⁵, Compression Ratio N2=1 x 10⁹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=97 mm, Flange Type=KF 40, Foreline Flange Size=KF 16 NW, Height=171.4 mm, Length=97 mm, Maximum Gas Throughput — Ar, Water Cooling=80 sccm, Maximum Gas Throughput — N2, Water Cooling=130 sccm, Noise Level=40 dB(A), Pumping Speed — Ar=40 L/s, Pumping Speed — H2=28 L/s, Pumping Speed — He=33 L/s, Pumping Speed — N2=44 L/s, Standards and Certifications=CE, C-CSA-US, RoHS compliant as per 2011/65/UE, Weight=2.37 kg, Width=97 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<5 x 10^-10 mbar, Compression Ratio Ar=>1 x 10⁹, Compression Ratio H2=1 x 10⁴, Compression Ratio He=2 x 10⁵, Compression Ratio N2=1 x 10⁹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=97 mm, Flange Type=KF 40, Foreline Flange Size=KF 16 NW, Height=171.4 mm, Length=97 mm, Maximum Gas Throughput — Ar, Water Cooling=80 sccm, Maximum Gas Throughput — N2, Water Cooling=130 sccm, Noise Level=40 dB(A), Pumping Speed — Ar=40 L/s, Pumping Speed — H2=28 L/s, Pumping Speed — He=33 L/s, Pumping Speed — N2=44 L/s, Standards and Certifications=CE, C-CSA-US, RoHS compliant as per 2011/65/UE, Weight=2.37 kg, Width=97 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<5 x 10^-10 mbar, Compression Ratio Ar=>1 x 10⁹, Compression Ratio H2=1 x 10⁴, Compression Ratio He=2 x 10⁵, Compression Ratio N2=1 x 10⁹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=97 mm, Flange Type=KF 40, Foreline Flange Size=KF 16 NW, Height=171.4 mm, Length=97 mm, Maximum Gas Throughput — Ar, Water Cooling=80 sccm, Maximum Gas Throughput — N2, Water Cooling=130 sccm, Noise Level=40 dB(A), Pumping Speed — Ar=40 L/s, Pumping Speed — H2=28 L/s, Pumping Speed — He=33 L/s, Pumping Speed — N2=44 L/s, Standards and Certifications=CE, C-CSA-US, RoHS compliant as per 2011/65/UE, Weight=2.37 kg, Width=97 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<5 x 10^-10 mbar, Compression Ratio Ar=>1 x 10⁹, Compression Ratio H2=1 x 10⁴, Compression Ratio He=2 x 10⁵, Compression Ratio N2=1 x 10⁹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=97 mm, Flange Type=KF 40, Foreline Flange Size=KF 16 NW, Height=171.4 mm, Length=97 mm, Maximum Gas Throughput — Ar, Water Cooling=80 sccm, Maximum Gas Throughput — N2, Water Cooling=130 sccm, Noise Level=40 dB(A), Pumping Speed — Ar=40 L/s, Pumping Speed — H2=28 L/s, Pumping Speed — He=33 L/s, Pumping Speed — N2=44 L/s, Standards and Certifications=CE, C-CSA-US, RoHS compliant as per 2011/65/UE, Weight=2.37 kg, Width=97 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<5 x 10^-10 mbar, Compression Ratio Ar=>1 x 10⁹, Compression Ratio H2=1 x 10⁴, Compression Ratio He=2 x 10⁵, Compression Ratio N2=1 x 10⁹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=97 mm, Flange Type=KF 40, Foreline Flange Size=KF 16 NW, Height=171.4 mm, Length=97 mm, Maximum Gas Throughput — Ar, Water Cooling=80 sccm, Maximum Gas Throughput — N2, Water Cooling=130 sccm, Noise Level=40 dB(A), Pumping Speed — Ar=40 L/s, Pumping Speed — H2=28 L/s, Pumping Speed — He=33 L/s, Pumping Speed — N2=44 L/s, Standards and Certifications=CE, C-CSA-US, RoHS compliant as per 2011/65/UE, Weight=2.37 kg, Width=97 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<5 x 10^-10 mbar, Compression Ratio Ar=>1 x 10⁹, Compression Ratio H2=1 x 10⁴, Compression Ratio He=2 x 10⁵, Compression Ratio N2=1 x 10⁹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=97 mm, Flange Type=KF 40, Foreline Flange Size=KF 16 NW, Height=171.4 mm, Length=97 mm, Maximum Gas Throughput — Ar, Water Cooling=80 sccm, Maximum Gas Throughput — N2, Water Cooling=130 sccm, Noise Level=40 dB(A), Pumping Speed — Ar=40 L/s, Pumping Speed — H2=28 L/s, Pumping Speed — He=33 L/s, Pumping Speed — N2=44 L/s, Standards and Certifications=CE, C-CSA-US, RoHS compliant as per 2011/65/UE, Weight=2.37 kg, Width=97 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<5 x 10^-10 mbar, Compression Ratio Ar=>1 x 10⁹, Compression Ratio H2=1 x 10⁴, Compression Ratio He=2 x 10⁵, Compression Ratio N2=1 x 10⁹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=97 mm, Flange Type=KF 40, Foreline Flange Size=KF 16 NW, Height=171.4 mm, Length=97 mm, Maximum Gas Throughput — Ar, Water Cooling=80 sccm, Maximum Gas Throughput — N2, Water Cooling=130 sccm, Noise Level=40 dB(A), Pumping Speed — Ar=40 L/s, Pumping Speed — H2=28 L/s, Pumping Speed — He=33 L/s, Pumping Speed — N2=44 L/s, Standards and Certifications=CE, C-CSA-US, RoHS compliant as per 2011/65/UE, Weight=2.37 kg, Width=97 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<5 x 10^-10 mbar, Compression Ratio Ar=>1 x 10⁹, Compression Ratio H2=1 x 10⁴, Compression Ratio He=2 x 10⁵, Compression Ratio N2=1 x 10⁹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=97 mm, Flange Type=KF 40, Foreline Flange Size=KF 16 NW, Height=171.4 mm, Length=97 mm, Maximum Gas Throughput — Ar, Water Cooling=80 sccm, Maximum Gas Throughput — N2, Water Cooling=130 sccm, Noise Level=40 dB(A), Pumping Speed — Ar=40 L/s, Pumping Speed — H2=28 L/s, Pumping Speed — He=33 L/s, Pumping Speed — N2=44 L/s, Standards and Certifications=CE, C-CSA-US, RoHS compliant as per 2011/65/UE, Weight=2.37 kg, Width=97 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<5 x 10^-10 mbar, Compression Ratio Ar=>1 x 10⁹, Compression Ratio H2=1 x 10⁴, Compression Ratio He=2 x 10⁵, Compression Ratio N2=1 x 10⁹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=97 mm, Flange Type=KF 40, Foreline Flange Size=KF 16 NW, Height=171.4 mm, Length=97 mm, Maximum Gas Throughput — Ar, Water Cooling=80 sccm, Maximum Gas Throughput — N2, Water Cooling=130 sccm, Noise Level=40 dB(A), Pumping Speed — Ar=40 L/s, Pumping Speed — H2=28 L/s, Pumping Speed — He=33 L/s, Pumping Speed — N2=44 L/s, Standards and Certifications=CE, C-CSA-US, RoHS compliant as per 2011/65/UE, Weight=2.37 kg, Width=97 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<5 x 10^-10 mbar, Compression Ratio Ar=>1 x 10⁹, Compression Ratio H2=1 x 10⁴, Compression Ratio He=2 x 10⁵, Compression Ratio N2=1 x 10⁹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=97 mm, Flange Type=KF 40, Foreline Flange Size=KF 16 NW, Height=171.4 mm, Length=97 mm, Maximum Gas Throughput — Ar, Water Cooling=80 sccm, Maximum Gas Throughput — N2, Water Cooling=130 sccm, Noise Level=40 dB(A), Pumping Speed — Ar=40 L/s, Pumping Speed — H2=28 L/s, Pumping Speed — He=33 L/s, Pumping Speed — N2=44 L/s, Standards and Certifications=CE, C-CSA-US, RoHS compliant as per 2011/65/UE, Weight=2.37 kg, Width=97 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<5 x 10^-10 mbar, Compression Ratio Ar=>1 x 10⁹, Compression Ratio H2=1 x 10⁴, Compression Ratio He=2 x 10⁵, Compression Ratio N2=1 x 10⁹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=97 mm, Flange Type=KF 40, Foreline Flange Size=KF 16 NW, Height=171.4 mm, Length=97 mm, Maximum Gas Throughput — Ar, Water Cooling=80 sccm, Maximum Gas Throughput — N2, Water Cooling=130 sccm, Noise Level=40 dB(A), Pumping Speed — Ar=40 L/s, Pumping Speed — H2=28 L/s, Pumping Speed — He=33 L/s, Pumping Speed — N2=44 L/s, Standards and Certifications=CE, C-CSA-US, RoHS compliant as per 2011/65/UE, Weight=2.37 kg, Width=97 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<5 x 10^-10 mbar, Compression Ratio Ar=>1 x 10⁹, Compression Ratio H2=1 x 10⁴, Compression Ratio He=2 x 10⁵, Compression Ratio N2=1 x 10⁹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=97 mm, Flange Type=KF 40, Foreline Flange Size=KF 16 NW, Height=171.4 mm, Length=97 mm, Maximum Gas Throughput — Ar, Water Cooling=80 sccm, Maximum Gas Throughput — N2, Water Cooling=130 sccm, Noise Level=40 dB(A), Pumping Speed — Ar=40 L/s, Pumping Speed — H2=28 L/s, Pumping Speed — He=33 L/s, Pumping Speed — N2=44 L/s, Standards and Certifications=CE, C-CSA-US, RoHS compliant as per 2011/65/UE, Weight=2.37 kg, Width=97 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<5 x 10^-10 mbar, Compression Ratio Ar=>1 x 10⁹, Compression Ratio H2=1 x 10⁴, Compression Ratio He=2 x 10⁵, Compression Ratio N2=1 x 10⁹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=97 mm, Flange Type=KF 40, Foreline Flange Size=KF 16 NW, Height=171.4 mm, Length=97 mm, Maximum Gas Throughput — Ar, Water Cooling=80 sccm, Maximum Gas Throughput — N2, Water Cooling=130 sccm, Noise Level=40 dB(A), Pumping Speed — Ar=40 L/s, Pumping Speed — H2=28 L/s, Pumping Speed — He=33 L/s, Pumping Speed — N2=44 L/s, Standards and Certifications=CE, C-CSA-US, RoHS compliant as per 2011/65/UE, Weight=2.37 kg, Width=97 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<5 x 10^-10 mbar, Compression Ratio Ar=>1 x 10⁹, Compression Ratio H2=1 x 10⁴, Compression Ratio He=2 x 10⁵, Compression Ratio N2=1 x 10⁹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=97 mm, Flange Type=KF 40, Foreline Flange Size=KF 16 NW, Height=171.4 mm, Length=97 mm, Maximum Gas Throughput — Ar, Water Cooling=80 sccm, Maximum Gas Throughput — N2, Water Cooling=130 sccm, Noise Level=40 dB(A), Pumping Speed — Ar=40 L/s, Pumping Speed — H2=28 L/s, Pumping Speed — He=33 L/s, Pumping Speed — N2=44 L/s, Standards and Certifications=CE, C-CSA-US, RoHS compliant as per 2011/65/UE, Weight=2.37 kg, Width=97 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<5 x 10^-10 mbar, Compression Ratio Ar=>1 x 10⁹, Compression Ratio H2=1 x 10⁴, Compression Ratio He=2 x 10⁵, Compression Ratio N2=1 x 10⁹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=97 mm, Flange Type=KF 40, Foreline Flange Size=KF 16 NW, Height=171.4 mm, Length=97 mm, Maximum Gas Throughput — Ar, Water Cooling=80 sccm, Maximum Gas Throughput — N2, Water Cooling=130 sccm, Noise Level=40 dB(A), Pumping Speed — Ar=40 L/s, Pumping Speed — H2=28 L/s, Pumping Speed — He=33 L/s, Pumping Speed — N2=44 L/s, Standards and Certifications=CE, C-CSA-US, RoHS compliant as per 2011/65/UE, Weight=2.37 kg, Width=97 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<5 x 10^-10 mbar, Compression Ratio Ar=>1 x 10⁹, Compression Ratio H2=1 x 10⁴, Compression Ratio He=2 x 10⁵, Compression Ratio N2=1 x 10⁹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=97 mm, Flange Type=KF 40, Foreline Flange Size=KF 16 NW, Height=171.4 mm, Length=97 mm, Maximum Gas Throughput — Ar, Water Cooling=80 sccm, Maximum Gas Throughput — N2, Water Cooling=130 sccm, Noise Level=40 dB(A), Pumping Speed — Ar=40 L/s, Pumping Speed — H2=28 L/s, Pumping Speed — He=33 L/s, Pumping Speed — N2=44 L/s, Standards and Certifications=CE, C-CSA-US, RoHS compliant as per 2011/65/UE, Weight=2.37 kg, Width=97 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<5 x 10^-10 mbar, Compression Ratio Ar=>1 x 10⁹, Compression Ratio H2=1 x 10⁴, Compression Ratio He=2 x 10⁵, Compression Ratio N2=1 x 10⁹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=97 mm, Flange Type=KF 40, Foreline Flange Size=KF 16 NW, Height=171.4 mm, Length=97 mm, Maximum Gas Throughput — Ar, Water Cooling=80 sccm, Maximum Gas Throughput — N2, Water Cooling=130 sccm, Noise Level=40 dB(A), Pumping Speed — Ar=40 L/s, Pumping Speed — H2=28 L/s, Pumping Speed — He=33 L/s, Pumping Speed — N2=44 L/s, Standards and Certifications=CE, C-CSA-US, RoHS compliant as per 2011/65/UE, Weight=2.37 kg, Width=97 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<5 x 10^-10 mbar, Compression Ratio Ar=>1 x 10⁹, Compression Ratio H2=1 x 10⁴, Compression Ratio He=2 x 10⁵, Compression Ratio N2=1 x 10⁹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=97 mm, Flange Type=KF 40, Foreline Flange Size=KF 16 NW, Height=171.4 mm, Length=97 mm, Maximum Gas Throughput — Ar, Water Cooling=80 sccm, Maximum Gas Throughput — N2, Water Cooling=130 sccm, Noise Level=40 dB(A), Pumping Speed — Ar=40 L/s, Pumping Speed — H2=28 L/s, Pumping Speed — He=33 L/s, Pumping Speed — N2=44 L/s, Standards and Certifications=CE, C-CSA-US, RoHS compliant as per 2011/65/UE, Weight=2.37 kg, Width=97 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<5 x 10^-10 mbar, Compression Ratio Ar=>1 x 10⁹, Compression Ratio H2=1 x 10⁴, Compression Ratio He=2 x 10⁵, Compression Ratio N2=1 x 10⁹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=97 mm, Flange Type=KF 40, Foreline Flange Size=KF 16 NW, Height=171.4 mm, Length=97 mm, Maximum Gas Throughput — Ar, Water Cooling=80 sccm, Maximum Gas Throughput — N2, Water Cooling=130 sccm, Noise Level=40 dB(A), Pumping Speed — Ar=40 L/s, Pumping Speed — H2=28 L/s, Pumping Speed — He=33 L/s, Pumping Speed — N2=44 L/s, Standards and Certifications=CE, C-CSA-US, RoHS compliant as per 2011/65/UE, Weight=2.37 kg, Width=97 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<5 x 10^-10 mbar, Compression Ratio Ar=>1 x 10⁹, Compression Ratio H2=1 x 10⁴, Compression Ratio He=2 x 10⁵, Compression Ratio N2=1 x 10⁹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=97 mm, Flange Type=KF 40, Foreline Flange Size=KF 16 NW, Height=171.4 mm, Length=97 mm, Maximum Gas Throughput — Ar, Water Cooling=80 sccm, Maximum Gas Throughput — N2, Water Cooling=130 sccm, Noise Level=40 dB(A), Pumping Speed — Ar=40 L/s, Pumping Speed — H2=28 L/s, Pumping Speed — He=33 L/s, Pumping Speed — N2=44 L/s, Standards and Certifications=CE, C-CSA-US, RoHS compliant as per 2011/65/UE, Weight=2.37 kg, Width=97 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<5 x 10^-10 mbar, Compression Ratio Ar=>1 x 10⁹, Compression Ratio H2=1 x 10⁴, Compression Ratio He=2 x 10⁵, Compression Ratio N2=1 x 10⁹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=97 mm, Flange Type=KF 40, Foreline Flange Size=KF 16 NW, Height=171.4 mm, Length=97 mm, Maximum Gas Throughput — Ar, Water Cooling=80 sccm, Maximum Gas Throughput — N2, Water Cooling=130 sccm, Noise Level=40 dB(A), Pumping Speed — Ar=40 L/s, Pumping Speed — H2=28 L/s, Pumping Speed — He=33 L/s, Pumping Speed — N2=44 L/s, Standards and Certifications=CE, C-CSA-US, RoHS compliant as per 2011/65/UE, Weight=2.37 kg, Width=97 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<5 x 10^-10 mbar, Compression Ratio Ar=>1 x 10⁹, Compression Ratio H2=1 x 10⁴, Compression Ratio He=2 x 10⁵, Compression Ratio N2=1 x 10⁹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=97 mm, Flange Type=KF 40, Foreline Flange Size=KF 16 NW, Height=171.4 mm, Length=97 mm, Maximum Gas Throughput — Ar, Water Cooling=80 sccm, Maximum Gas Throughput — N2, Water Cooling=130 sccm, Noise Level=40 dB(A), Pumping Speed — Ar=40 L/s, Pumping Speed — H2=28 L/s, Pumping Speed — He=33 L/s, Pumping Speed — N2=44 L/s, Standards and Certifications=CE, C-CSA-US, RoHS compliant as per 2011/65/UE, Weight=2.37 kg, Width=97 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<5 x 10^-10 mbar, Compression Ratio Ar=>1 x 10⁹, Compression Ratio H2=1 x 10⁴, Compression Ratio He=2 x 10⁵, Compression Ratio N2=1 x 10⁹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=97 mm, Flange Type=KF 40, Foreline Flange Size=KF 16 NW, Height=171.4 mm, Length=97 mm, Maximum Gas Throughput — Ar, Water Cooling=80 sccm, Maximum Gas Throughput — N2, Water Cooling=130 sccm, Noise Level=40 dB(A), Pumping Speed — Ar=40 L/s, Pumping Speed — H2=28 L/s, Pumping Speed — He=33 L/s, Pumping Speed — N2=44 L/s, Standards and Certifications=CE, C-CSA-US, RoHS compliant as per 2011/65/UE, Weight=2.37 kg, Width=97 mm}—>

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Ambient Operating Temperature	+5 to +35 °C
Ambient Storage Temperature	-40 to +70 °C
Base Pressure	<5 x 10-10 mbar <!— Base Pressure::<5 x 10-10 mbar —>
Compression Ratio Ar	>1 x 109
Compression Ratio H2	1 x 104 <!— Compression Ratio H2::1 x 104 —>
Compression Ratio He	2 x 105 <!— Compression Ratio He::2 x 105 —>
Compression Ratio N2	1 x 109 <!— Compression Ratio N2::1 x 109 —>
Cooling Method	<!— "multilineKeyVal pipe value":Air cooling Water cooling —> Air cooling Water cooling
Diameter	97 mm
Flange Type	KF 40
Foreline Flange Size	KF 16 NW
Height	171.4 mm
Length	97 mm
Maximum Gas Throughput — Ar, Water Cooling	80 sccm
Maximum Gas Throughput — N2, Water Cooling	130 sccm
Noise Level	40 dB(A)
Pumping Speed — Ar	40 L/s
Pumping Speed — H2	28 L/s
Pumping Speed — He	33 L/s
Pumping Speed — N2	44 L/s
Standards and Certifications	CE, C-CSA-US, RoHS compliant as per 2011/65/UE <!— Standards and Certifications::CE, C-CSA-US, RoHS compliant as per 2011/65/UE —>
Weight	2.37 kg
Width	97 mm