<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10—10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=>3 x 106, Compression Ratio He=2 x 108, Compression Ratio N2=>1 x 1011, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=ISO 160 K, Foreline Flange Size=KF 25 NW, Height=240 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1
61010-1
DIR 2006/42/CE
DIR 2014/35/EU
DIR 2014/30/EU
DIR 2011/65/EU, Weight=20.6 kg, Width=207 mm}—>
Ambient Operating Temperature |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10—10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=>3 x 106, Compression Ratio He=2 x 108, Compression Ratio N2=>1 x 1011, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=ISO 160 K, Foreline Flange Size=KF 25 NW, Height=240 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1
61010-1
DIR 2006/42/CE
DIR 2014/35/EU
DIR 2014/30/EU
DIR 2011/65/EU, Weight=20.6 kg, Width=207 mm}—>
Ambient Storage Temperature |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10—10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=>3 x 106, Compression Ratio He=2 x 108, Compression Ratio N2=>1 x 1011, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=ISO 160 K, Foreline Flange Size=KF 25 NW, Height=240 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1
61010-1
DIR 2006/42/CE
DIR 2014/35/EU
DIR 2014/30/EU
DIR 2011/65/EU, Weight=20.6 kg, Width=207 mm}—>
Base Pressure |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10—10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=>3 x 106, Compression Ratio He=2 x 108, Compression Ratio N2=>1 x 1011, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=ISO 160 K, Foreline Flange Size=KF 25 NW, Height=240 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1
61010-1
DIR 2006/42/CE
DIR 2014/35/EU
DIR 2014/30/EU
DIR 2011/65/EU, Weight=20.6 kg, Width=207 mm}—>
Compression Ratio Ar |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10—10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=>3 x 106, Compression Ratio He=2 x 108, Compression Ratio N2=>1 x 1011, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=ISO 160 K, Foreline Flange Size=KF 25 NW, Height=240 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1
61010-1
DIR 2006/42/CE
DIR 2014/35/EU
DIR 2014/30/EU
DIR 2011/65/EU, Weight=20.6 kg, Width=207 mm}—>
Compression Ratio H2 |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10—10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=>3 x 106, Compression Ratio He=2 x 108, Compression Ratio N2=>1 x 1011, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=ISO 160 K, Foreline Flange Size=KF 25 NW, Height=240 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1
61010-1
DIR 2006/42/CE
DIR 2014/35/EU
DIR 2014/30/EU
DIR 2011/65/EU, Weight=20.6 kg, Width=207 mm}—>
Compression Ratio He |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10—10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=>3 x 106, Compression Ratio He=2 x 108, Compression Ratio N2=>1 x 1011, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=ISO 160 K, Foreline Flange Size=KF 25 NW, Height=240 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1
61010-1
DIR 2006/42/CE
DIR 2014/35/EU
DIR 2014/30/EU
DIR 2011/65/EU, Weight=20.6 kg, Width=207 mm}—>
Compression Ratio N2 |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10—10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=>3 x 106, Compression Ratio He=2 x 108, Compression Ratio N2=>1 x 1011, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=ISO 160 K, Foreline Flange Size=KF 25 NW, Height=240 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1
61010-1
DIR 2006/42/CE
DIR 2014/35/EU
DIR 2014/30/EU
DIR 2011/65/EU, Weight=20.6 kg, Width=207 mm}—>
Cooling Method |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10—10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=>3 x 106, Compression Ratio He=2 x 108, Compression Ratio N2=>1 x 1011, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=ISO 160 K, Foreline Flange Size=KF 25 NW, Height=240 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1
61010-1
DIR 2006/42/CE
DIR 2014/35/EU
DIR 2014/30/EU
DIR 2011/65/EU, Weight=20.6 kg, Width=207 mm}—>
Diameter |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10—10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=>3 x 106, Compression Ratio He=2 x 108, Compression Ratio N2=>1 x 1011, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=ISO 160 K, Foreline Flange Size=KF 25 NW, Height=240 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1
61010-1
DIR 2006/42/CE
DIR 2014/35/EU
DIR 2014/30/EU
DIR 2011/65/EU, Weight=20.6 kg, Width=207 mm}—>
Flange Type |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10—10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=>3 x 106, Compression Ratio He=2 x 108, Compression Ratio N2=>1 x 1011, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=ISO 160 K, Foreline Flange Size=KF 25 NW, Height=240 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1
61010-1
DIR 2006/42/CE
DIR 2014/35/EU
DIR 2014/30/EU
DIR 2011/65/EU, Weight=20.6 kg, Width=207 mm}—>
Foreline Flange Size |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10—10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=>3 x 106, Compression Ratio He=2 x 108, Compression Ratio N2=>1 x 1011, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=ISO 160 K, Foreline Flange Size=KF 25 NW, Height=240 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1
61010-1
DIR 2006/42/CE
DIR 2014/35/EU
DIR 2014/30/EU
DIR 2011/65/EU, Weight=20.6 kg, Width=207 mm}—>
Height |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10—10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=>3 x 106, Compression Ratio He=2 x 108, Compression Ratio N2=>1 x 1011, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=ISO 160 K, Foreline Flange Size=KF 25 NW, Height=240 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1
61010-1
DIR 2006/42/CE
DIR 2014/35/EU
DIR 2014/30/EU
DIR 2011/65/EU, Weight=20.6 kg, Width=207 mm}—>
Length |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10—10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=>3 x 106, Compression Ratio He=2 x 108, Compression Ratio N2=>1 x 1011, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=ISO 160 K, Foreline Flange Size=KF 25 NW, Height=240 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1
61010-1
DIR 2006/42/CE
DIR 2014/35/EU
DIR 2014/30/EU
DIR 2011/65/EU, Weight=20.6 kg, Width=207 mm}—>
Maximum Gas Throughput — Ar, Water Cooling |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10—10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=>3 x 106, Compression Ratio He=2 x 108, Compression Ratio N2=>1 x 1011, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=ISO 160 K, Foreline Flange Size=KF 25 NW, Height=240 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1
61010-1
DIR 2006/42/CE
DIR 2014/35/EU
DIR 2014/30/EU
DIR 2011/65/EU, Weight=20.6 kg, Width=207 mm}—>
Maximum Gas Throughput — He, Water Cooling |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10—10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=>3 x 106, Compression Ratio He=2 x 108, Compression Ratio N2=>1 x 1011, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=ISO 160 K, Foreline Flange Size=KF 25 NW, Height=240 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1
61010-1
DIR 2006/42/CE
DIR 2014/35/EU
DIR 2014/30/EU
DIR 2011/65/EU, Weight=20.6 kg, Width=207 mm}—>
Maximum Gas Throughput — N2, Water Cooling |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10—10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=>3 x 106, Compression Ratio He=2 x 108, Compression Ratio N2=>1 x 1011, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=ISO 160 K, Foreline Flange Size=KF 25 NW, Height=240 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1
61010-1
DIR 2006/42/CE
DIR 2014/35/EU
DIR 2014/30/EU
DIR 2011/65/EU, Weight=20.6 kg, Width=207 mm}—>
Noise Level |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10—10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=>3 x 106, Compression Ratio He=2 x 108, Compression Ratio N2=>1 x 1011, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=ISO 160 K, Foreline Flange Size=KF 25 NW, Height=240 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1
61010-1
DIR 2006/42/CE
DIR 2014/35/EU
DIR 2014/30/EU
DIR 2011/65/EU, Weight=20.6 kg, Width=207 mm}—>
Pumping Speed — Ar |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10—10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=>3 x 106, Compression Ratio He=2 x 108, Compression Ratio N2=>1 x 1011, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=ISO 160 K, Foreline Flange Size=KF 25 NW, Height=240 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1
61010-1
DIR 2006/42/CE
DIR 2014/35/EU
DIR 2014/30/EU
DIR 2011/65/EU, Weight=20.6 kg, Width=207 mm}—>
Pumping Speed — H2 |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10—10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=>3 x 106, Compression Ratio He=2 x 108, Compression Ratio N2=>1 x 1011, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=ISO 160 K, Foreline Flange Size=KF 25 NW, Height=240 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1
61010-1
DIR 2006/42/CE
DIR 2014/35/EU
DIR 2014/30/EU
DIR 2011/65/EU, Weight=20.6 kg, Width=207 mm}—>
Pumping Speed — He |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10—10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=>3 x 106, Compression Ratio He=2 x 108, Compression Ratio N2=>1 x 1011, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=ISO 160 K, Foreline Flange Size=KF 25 NW, Height=240 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1
61010-1
DIR 2006/42/CE
DIR 2014/35/EU
DIR 2014/30/EU
DIR 2011/65/EU, Weight=20.6 kg, Width=207 mm}—>
Pumping Speed — N2 |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10—10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=>3 x 106, Compression Ratio He=2 x 108, Compression Ratio N2=>1 x 1011, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=ISO 160 K, Foreline Flange Size=KF 25 NW, Height=240 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1
61010-1
DIR 2006/42/CE
DIR 2014/35/EU
DIR 2014/30/EU
DIR 2011/65/EU, Weight=20.6 kg, Width=207 mm}—>
Standards and Certifications |
- 61326-1
61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU
<!— Standards and Certifications::61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU —>
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10—10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=>3 x 106, Compression Ratio He=2 x 108, Compression Ratio N2=>1 x 1011, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=ISO 160 K, Foreline Flange Size=KF 25 NW, Height=240 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1
61010-1
DIR 2006/42/CE
DIR 2014/35/EU
DIR 2014/30/EU
DIR 2011/65/EU, Weight=20.6 kg, Width=207 mm}—>
Weight |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10—10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=>3 x 106, Compression Ratio He=2 x 108, Compression Ratio N2=>1 x 1011, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=ISO 160 K, Foreline Flange Size=KF 25 NW, Height=240 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1
61010-1
DIR 2006/42/CE
DIR 2014/35/EU
DIR 2014/30/EU
DIR 2011/65/EU, Weight=20.6 kg, Width=207 mm}—>
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