X3511-64018

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=>3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=CFF 8, Foreline Flange Size=KF 25 NW, Height=250 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=22.5 kg, Width=207 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=>3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=CFF 8, Foreline Flange Size=KF 25 NW, Height=250 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=22.5 kg, Width=207 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=>3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=CFF 8, Foreline Flange Size=KF 25 NW, Height=250 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=22.5 kg, Width=207 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=>3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=CFF 8, Foreline Flange Size=KF 25 NW, Height=250 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=22.5 kg, Width=207 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=>3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=CFF 8, Foreline Flange Size=KF 25 NW, Height=250 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=22.5 kg, Width=207 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=>3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=CFF 8, Foreline Flange Size=KF 25 NW, Height=250 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=22.5 kg, Width=207 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=>3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=CFF 8, Foreline Flange Size=KF 25 NW, Height=250 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=22.5 kg, Width=207 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=>3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=CFF 8, Foreline Flange Size=KF 25 NW, Height=250 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=22.5 kg, Width=207 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=>3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=CFF 8, Foreline Flange Size=KF 25 NW, Height=250 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=22.5 kg, Width=207 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=>3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=CFF 8, Foreline Flange Size=KF 25 NW, Height=250 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=22.5 kg, Width=207 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=>3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=CFF 8, Foreline Flange Size=KF 25 NW, Height=250 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=22.5 kg, Width=207 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=>3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=CFF 8, Foreline Flange Size=KF 25 NW, Height=250 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=22.5 kg, Width=207 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=>3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=CFF 8, Foreline Flange Size=KF 25 NW, Height=250 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=22.5 kg, Width=207 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=>3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=CFF 8, Foreline Flange Size=KF 25 NW, Height=250 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=22.5 kg, Width=207 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=>3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=CFF 8, Foreline Flange Size=KF 25 NW, Height=250 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=22.5 kg, Width=207 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=>3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=CFF 8, Foreline Flange Size=KF 25 NW, Height=250 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=22.5 kg, Width=207 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=>3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=CFF 8, Foreline Flange Size=KF 25 NW, Height=250 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=22.5 kg, Width=207 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=>3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=CFF 8, Foreline Flange Size=KF 25 NW, Height=250 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=22.5 kg, Width=207 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=>3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=CFF 8, Foreline Flange Size=KF 25 NW, Height=250 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=22.5 kg, Width=207 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=>3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=CFF 8, Foreline Flange Size=KF 25 NW, Height=250 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=22.5 kg, Width=207 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=>3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=CFF 8, Foreline Flange Size=KF 25 NW, Height=250 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=22.5 kg, Width=207 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=>3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=CFF 8, Foreline Flange Size=KF 25 NW, Height=250 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=22.5 kg, Width=207 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=>3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=CFF 8, Foreline Flange Size=KF 25 NW, Height=250 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=22.5 kg, Width=207 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=>3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Diameter=207 mm, Flange Type=CFF 8, Foreline Flange Size=KF 25 NW, Height=250 mm, Length=207 mm, Maximum Gas Throughput — Ar, Water Cooling=3.3 mbar l/s; 195 sccm, Maximum Gas Throughput — He, Water Cooling=10.4 mbar/Ls; 615 SCCM, Maximum Gas Throughput — N2, Water Cooling=6.2 mbar l/s; 367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=625 L/s, Pumping Speed — H2=480 L/s, Pumping Speed — He=640 L/s, Pumping Speed — N2=660 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=22.5 kg, Width=207 mm}—>

<!—

—>

Ambient Operating Temperature	+5 to +35 °C
Ambient Storage Temperature	-40 to +70 °C
Base Pressure	<1 x 10-10 mbar <!— Base Pressure::<1 x 10-10 mbar —>
Compression Ratio Ar	>1 x 1011
Compression Ratio H2	>3 x 106
Compression Ratio He	2 x 108 <!— Compression Ratio He::2 x 108 —>
Compression Ratio N2	>1 x 1011
Cooling Method	<!— "multilineKeyVal pipe value":Air cooling Water cooling —> Air cooling Water cooling
Diameter	207 mm
Flange Type	CFF 8
Foreline Flange Size	KF 25 NW
Height	250 mm
Length	207 mm
Maximum Gas Throughput — Ar, Water Cooling	3.3 mbar l/s; 195 sccm
Maximum Gas Throughput — He, Water Cooling	10.4 mbar/Ls; 615 SCCM
Maximum Gas Throughput — N2, Water Cooling	6.2 mbar l/s; 367 sccm
Noise Level	43 dB(A)
Pumping Speed — Ar	625 L/s
Pumping Speed — H2	480 L/s
Pumping Speed — He	640 L/s
Pumping Speed — N2	660 L/s
Standards and Certifications	61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU <!— Standards and Certifications::61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU —>
Weight	22.5 kg
Width	207 mm