X3511-64020

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Flange Type=ISO 100 F, Foreline Flange Size=KF 25 NW, Height=278.94 mm, Length=207.5 mm, Maximum Gas Throughput — Ar, Water Cooling=195 sccm, Maximum Gas Throughput — He, Water Cooling=615 sccm, Maximum Gas Throughput — N2, Water Cooling=367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=340 L/s, Pumping Speed — H2=415 L/s, Pumping Speed — He=505 L/s, Pumping Speed — N2=380 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=23.7 kg, Width=207.5 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Flange Type=ISO 100 F, Foreline Flange Size=KF 25 NW, Height=278.94 mm, Length=207.5 mm, Maximum Gas Throughput — Ar, Water Cooling=195 sccm, Maximum Gas Throughput — He, Water Cooling=615 sccm, Maximum Gas Throughput — N2, Water Cooling=367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=340 L/s, Pumping Speed — H2=415 L/s, Pumping Speed — He=505 L/s, Pumping Speed — N2=380 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=23.7 kg, Width=207.5 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Flange Type=ISO 100 F, Foreline Flange Size=KF 25 NW, Height=278.94 mm, Length=207.5 mm, Maximum Gas Throughput — Ar, Water Cooling=195 sccm, Maximum Gas Throughput — He, Water Cooling=615 sccm, Maximum Gas Throughput — N2, Water Cooling=367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=340 L/s, Pumping Speed — H2=415 L/s, Pumping Speed — He=505 L/s, Pumping Speed — N2=380 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=23.7 kg, Width=207.5 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Flange Type=ISO 100 F, Foreline Flange Size=KF 25 NW, Height=278.94 mm, Length=207.5 mm, Maximum Gas Throughput — Ar, Water Cooling=195 sccm, Maximum Gas Throughput — He, Water Cooling=615 sccm, Maximum Gas Throughput — N2, Water Cooling=367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=340 L/s, Pumping Speed — H2=415 L/s, Pumping Speed — He=505 L/s, Pumping Speed — N2=380 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=23.7 kg, Width=207.5 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Flange Type=ISO 100 F, Foreline Flange Size=KF 25 NW, Height=278.94 mm, Length=207.5 mm, Maximum Gas Throughput — Ar, Water Cooling=195 sccm, Maximum Gas Throughput — He, Water Cooling=615 sccm, Maximum Gas Throughput — N2, Water Cooling=367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=340 L/s, Pumping Speed — H2=415 L/s, Pumping Speed — He=505 L/s, Pumping Speed — N2=380 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=23.7 kg, Width=207.5 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Flange Type=ISO 100 F, Foreline Flange Size=KF 25 NW, Height=278.94 mm, Length=207.5 mm, Maximum Gas Throughput — Ar, Water Cooling=195 sccm, Maximum Gas Throughput — He, Water Cooling=615 sccm, Maximum Gas Throughput — N2, Water Cooling=367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=340 L/s, Pumping Speed — H2=415 L/s, Pumping Speed — He=505 L/s, Pumping Speed — N2=380 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=23.7 kg, Width=207.5 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Flange Type=ISO 100 F, Foreline Flange Size=KF 25 NW, Height=278.94 mm, Length=207.5 mm, Maximum Gas Throughput — Ar, Water Cooling=195 sccm, Maximum Gas Throughput — He, Water Cooling=615 sccm, Maximum Gas Throughput — N2, Water Cooling=367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=340 L/s, Pumping Speed — H2=415 L/s, Pumping Speed — He=505 L/s, Pumping Speed — N2=380 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=23.7 kg, Width=207.5 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Flange Type=ISO 100 F, Foreline Flange Size=KF 25 NW, Height=278.94 mm, Length=207.5 mm, Maximum Gas Throughput — Ar, Water Cooling=195 sccm, Maximum Gas Throughput — He, Water Cooling=615 sccm, Maximum Gas Throughput — N2, Water Cooling=367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=340 L/s, Pumping Speed — H2=415 L/s, Pumping Speed — He=505 L/s, Pumping Speed — N2=380 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=23.7 kg, Width=207.5 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Flange Type=ISO 100 F, Foreline Flange Size=KF 25 NW, Height=278.94 mm, Length=207.5 mm, Maximum Gas Throughput — Ar, Water Cooling=195 sccm, Maximum Gas Throughput — He, Water Cooling=615 sccm, Maximum Gas Throughput — N2, Water Cooling=367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=340 L/s, Pumping Speed — H2=415 L/s, Pumping Speed — He=505 L/s, Pumping Speed — N2=380 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=23.7 kg, Width=207.5 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Flange Type=ISO 100 F, Foreline Flange Size=KF 25 NW, Height=278.94 mm, Length=207.5 mm, Maximum Gas Throughput — Ar, Water Cooling=195 sccm, Maximum Gas Throughput — He, Water Cooling=615 sccm, Maximum Gas Throughput — N2, Water Cooling=367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=340 L/s, Pumping Speed — H2=415 L/s, Pumping Speed — He=505 L/s, Pumping Speed — N2=380 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=23.7 kg, Width=207.5 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Flange Type=ISO 100 F, Foreline Flange Size=KF 25 NW, Height=278.94 mm, Length=207.5 mm, Maximum Gas Throughput — Ar, Water Cooling=195 sccm, Maximum Gas Throughput — He, Water Cooling=615 sccm, Maximum Gas Throughput — N2, Water Cooling=367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=340 L/s, Pumping Speed — H2=415 L/s, Pumping Speed — He=505 L/s, Pumping Speed — N2=380 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=23.7 kg, Width=207.5 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Flange Type=ISO 100 F, Foreline Flange Size=KF 25 NW, Height=278.94 mm, Length=207.5 mm, Maximum Gas Throughput — Ar, Water Cooling=195 sccm, Maximum Gas Throughput — He, Water Cooling=615 sccm, Maximum Gas Throughput — N2, Water Cooling=367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=340 L/s, Pumping Speed — H2=415 L/s, Pumping Speed — He=505 L/s, Pumping Speed — N2=380 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=23.7 kg, Width=207.5 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Flange Type=ISO 100 F, Foreline Flange Size=KF 25 NW, Height=278.94 mm, Length=207.5 mm, Maximum Gas Throughput — Ar, Water Cooling=195 sccm, Maximum Gas Throughput — He, Water Cooling=615 sccm, Maximum Gas Throughput — N2, Water Cooling=367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=340 L/s, Pumping Speed — H2=415 L/s, Pumping Speed — He=505 L/s, Pumping Speed — N2=380 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=23.7 kg, Width=207.5 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Flange Type=ISO 100 F, Foreline Flange Size=KF 25 NW, Height=278.94 mm, Length=207.5 mm, Maximum Gas Throughput — Ar, Water Cooling=195 sccm, Maximum Gas Throughput — He, Water Cooling=615 sccm, Maximum Gas Throughput — N2, Water Cooling=367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=340 L/s, Pumping Speed — H2=415 L/s, Pumping Speed — He=505 L/s, Pumping Speed — N2=380 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=23.7 kg, Width=207.5 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Flange Type=ISO 100 F, Foreline Flange Size=KF 25 NW, Height=278.94 mm, Length=207.5 mm, Maximum Gas Throughput — Ar, Water Cooling=195 sccm, Maximum Gas Throughput — He, Water Cooling=615 sccm, Maximum Gas Throughput — N2, Water Cooling=367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=340 L/s, Pumping Speed — H2=415 L/s, Pumping Speed — He=505 L/s, Pumping Speed — N2=380 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=23.7 kg, Width=207.5 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Flange Type=ISO 100 F, Foreline Flange Size=KF 25 NW, Height=278.94 mm, Length=207.5 mm, Maximum Gas Throughput — Ar, Water Cooling=195 sccm, Maximum Gas Throughput — He, Water Cooling=615 sccm, Maximum Gas Throughput — N2, Water Cooling=367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=340 L/s, Pumping Speed — H2=415 L/s, Pumping Speed — He=505 L/s, Pumping Speed — N2=380 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=23.7 kg, Width=207.5 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Flange Type=ISO 100 F, Foreline Flange Size=KF 25 NW, Height=278.94 mm, Length=207.5 mm, Maximum Gas Throughput — Ar, Water Cooling=195 sccm, Maximum Gas Throughput — He, Water Cooling=615 sccm, Maximum Gas Throughput — N2, Water Cooling=367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=340 L/s, Pumping Speed — H2=415 L/s, Pumping Speed — He=505 L/s, Pumping Speed — N2=380 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=23.7 kg, Width=207.5 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Flange Type=ISO 100 F, Foreline Flange Size=KF 25 NW, Height=278.94 mm, Length=207.5 mm, Maximum Gas Throughput — Ar, Water Cooling=195 sccm, Maximum Gas Throughput — He, Water Cooling=615 sccm, Maximum Gas Throughput — N2, Water Cooling=367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=340 L/s, Pumping Speed — H2=415 L/s, Pumping Speed — He=505 L/s, Pumping Speed — N2=380 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=23.7 kg, Width=207.5 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Flange Type=ISO 100 F, Foreline Flange Size=KF 25 NW, Height=278.94 mm, Length=207.5 mm, Maximum Gas Throughput — Ar, Water Cooling=195 sccm, Maximum Gas Throughput — He, Water Cooling=615 sccm, Maximum Gas Throughput — N2, Water Cooling=367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=340 L/s, Pumping Speed — H2=415 L/s, Pumping Speed — He=505 L/s, Pumping Speed — N2=380 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=23.7 kg, Width=207.5 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Flange Type=ISO 100 F, Foreline Flange Size=KF 25 NW, Height=278.94 mm, Length=207.5 mm, Maximum Gas Throughput — Ar, Water Cooling=195 sccm, Maximum Gas Throughput — He, Water Cooling=615 sccm, Maximum Gas Throughput — N2, Water Cooling=367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=340 L/s, Pumping Speed — H2=415 L/s, Pumping Speed — He=505 L/s, Pumping Speed — N2=380 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=23.7 kg, Width=207.5 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Flange Type=ISO 100 F, Foreline Flange Size=KF 25 NW, Height=278.94 mm, Length=207.5 mm, Maximum Gas Throughput — Ar, Water Cooling=195 sccm, Maximum Gas Throughput — He, Water Cooling=615 sccm, Maximum Gas Throughput — N2, Water Cooling=367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=340 L/s, Pumping Speed — H2=415 L/s, Pumping Speed — He=505 L/s, Pumping Speed — N2=380 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=23.7 kg, Width=207.5 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Flange Type=ISO 100 F, Foreline Flange Size=KF 25 NW, Height=278.94 mm, Length=207.5 mm, Maximum Gas Throughput — Ar, Water Cooling=195 sccm, Maximum Gas Throughput — He, Water Cooling=615 sccm, Maximum Gas Throughput — N2, Water Cooling=367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=340 L/s, Pumping Speed — H2=415 L/s, Pumping Speed — He=505 L/s, Pumping Speed — N2=380 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=23.7 kg, Width=207.5 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10^-10 mbar, Compression Ratio Ar=>1 x 10¹¹, Compression Ratio H2=3 x 10⁶, Compression Ratio He=2 x 10⁸, Compression Ratio N2=>1 x 10¹¹, Cooling Method|MultiLine=Air cooling|Water cooling|, Flange Type=ISO 100 F, Foreline Flange Size=KF 25 NW, Height=278.94 mm, Length=207.5 mm, Maximum Gas Throughput — Ar, Water Cooling=195 sccm, Maximum Gas Throughput — He, Water Cooling=615 sccm, Maximum Gas Throughput — N2, Water Cooling=367 sccm, Noise Level=43 dB(A), Pumping Speed — Ar=340 L/s, Pumping Speed — H2=415 L/s, Pumping Speed — He=505 L/s, Pumping Speed — N2=380 L/s, Standards and Certifications=61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU, Weight=23.7 kg, Width=207.5 mm}—>

<!—

—>

Ambient Operating Temperature	+5 to +35 °C
Ambient Storage Temperature	-40 to +70 °C
Base Pressure	<1 x 10-10 mbar <!— Base Pressure::<1 x 10-10 mbar —>
Compression Ratio Ar	>1 x 1011
Compression Ratio H2	3 x 106 <!— Compression Ratio H2::3 x 106 —>
Compression Ratio He	2 x 108 <!— Compression Ratio He::2 x 108 —>
Compression Ratio N2	>1 x 1011
Cooling Method	<!— "multilineKeyVal pipe value":Air cooling Water cooling —> Air cooling Water cooling
Flange Type	ISO 100 F
Foreline Flange Size	KF 25 NW
Height	278.94 mm
Length	207.5 mm
Maximum Gas Throughput — Ar, Water Cooling	195 sccm
Maximum Gas Throughput — He, Water Cooling	615 sccm
Maximum Gas Throughput — N2, Water Cooling	367 sccm
Noise Level	43 dB(A)
Pumping Speed — Ar	340 L/s
Pumping Speed — H2	415 L/s
Pumping Speed — He	505 L/s
Pumping Speed — N2	380 L/s
Standards and Certifications	61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU <!— Standards and Certifications::61326-1 61010-1 DIR 2006/42/CE DIR 2014/35/EU DIR 2014/30/EU DIR 2011/65/EU —>
Weight	23.7 kg
Width	207.5 mm