<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10-10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=1.5 x 106, Compression Ratio He=>1 x 108, Compression Ratio N2=>1 x 1011, Cooling Method=Air cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=180.31 mm, Length=174.8 mm, Maximum Gas Throughput — N2, Water Cooling=250 sccm, Noise Level=41 dB(A), Pumping Speed — Ar=250 L/s, Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Ambient Operating Temperature |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10-10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=1.5 x 106, Compression Ratio He=>1 x 108, Compression Ratio N2=>1 x 1011, Cooling Method=Air cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=180.31 mm, Length=174.8 mm, Maximum Gas Throughput — N2, Water Cooling=250 sccm, Noise Level=41 dB(A), Pumping Speed — Ar=250 L/s, Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Ambient Storage Temperature |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10-10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=1.5 x 106, Compression Ratio He=>1 x 108, Compression Ratio N2=>1 x 1011, Cooling Method=Air cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=180.31 mm, Length=174.8 mm, Maximum Gas Throughput — N2, Water Cooling=250 sccm, Noise Level=41 dB(A), Pumping Speed — Ar=250 L/s, Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Base Pressure |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10-10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=1.5 x 106, Compression Ratio He=>1 x 108, Compression Ratio N2=>1 x 1011, Cooling Method=Air cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=180.31 mm, Length=174.8 mm, Maximum Gas Throughput — N2, Water Cooling=250 sccm, Noise Level=41 dB(A), Pumping Speed — Ar=250 L/s, Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Compression Ratio Ar |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10-10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=1.5 x 106, Compression Ratio He=>1 x 108, Compression Ratio N2=>1 x 1011, Cooling Method=Air cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=180.31 mm, Length=174.8 mm, Maximum Gas Throughput — N2, Water Cooling=250 sccm, Noise Level=41 dB(A), Pumping Speed — Ar=250 L/s, Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Compression Ratio H2 |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10-10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=1.5 x 106, Compression Ratio He=>1 x 108, Compression Ratio N2=>1 x 1011, Cooling Method=Air cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=180.31 mm, Length=174.8 mm, Maximum Gas Throughput — N2, Water Cooling=250 sccm, Noise Level=41 dB(A), Pumping Speed — Ar=250 L/s, Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Compression Ratio He |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10-10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=1.5 x 106, Compression Ratio He=>1 x 108, Compression Ratio N2=>1 x 1011, Cooling Method=Air cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=180.31 mm, Length=174.8 mm, Maximum Gas Throughput — N2, Water Cooling=250 sccm, Noise Level=41 dB(A), Pumping Speed — Ar=250 L/s, Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Compression Ratio N2 |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10-10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=1.5 x 106, Compression Ratio He=>1 x 108, Compression Ratio N2=>1 x 1011, Cooling Method=Air cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=180.31 mm, Length=174.8 mm, Maximum Gas Throughput — N2, Water Cooling=250 sccm, Noise Level=41 dB(A), Pumping Speed — Ar=250 L/s, Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Cooling Method |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10-10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=1.5 x 106, Compression Ratio He=>1 x 108, Compression Ratio N2=>1 x 1011, Cooling Method=Air cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=180.31 mm, Length=174.8 mm, Maximum Gas Throughput — N2, Water Cooling=250 sccm, Noise Level=41 dB(A), Pumping Speed — Ar=250 L/s, Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Flange Type |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10-10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=1.5 x 106, Compression Ratio He=>1 x 108, Compression Ratio N2=>1 x 1011, Cooling Method=Air cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=180.31 mm, Length=174.8 mm, Maximum Gas Throughput — N2, Water Cooling=250 sccm, Noise Level=41 dB(A), Pumping Speed — Ar=250 L/s, Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Foreline Flange Size |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10-10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=1.5 x 106, Compression Ratio He=>1 x 108, Compression Ratio N2=>1 x 1011, Cooling Method=Air cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=180.31 mm, Length=174.8 mm, Maximum Gas Throughput — N2, Water Cooling=250 sccm, Noise Level=41 dB(A), Pumping Speed — Ar=250 L/s, Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Height |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10-10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=1.5 x 106, Compression Ratio He=>1 x 108, Compression Ratio N2=>1 x 1011, Cooling Method=Air cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=180.31 mm, Length=174.8 mm, Maximum Gas Throughput — N2, Water Cooling=250 sccm, Noise Level=41 dB(A), Pumping Speed — Ar=250 L/s, Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Length |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10-10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=1.5 x 106, Compression Ratio He=>1 x 108, Compression Ratio N2=>1 x 1011, Cooling Method=Air cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=180.31 mm, Length=174.8 mm, Maximum Gas Throughput — N2, Water Cooling=250 sccm, Noise Level=41 dB(A), Pumping Speed — Ar=250 L/s, Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Maximum Gas Throughput — N2, Water Cooling |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10-10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=1.5 x 106, Compression Ratio He=>1 x 108, Compression Ratio N2=>1 x 1011, Cooling Method=Air cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=180.31 mm, Length=174.8 mm, Maximum Gas Throughput — N2, Water Cooling=250 sccm, Noise Level=41 dB(A), Pumping Speed — Ar=250 L/s, Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Noise Level |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10-10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=1.5 x 106, Compression Ratio He=>1 x 108, Compression Ratio N2=>1 x 1011, Cooling Method=Air cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=180.31 mm, Length=174.8 mm, Maximum Gas Throughput — N2, Water Cooling=250 sccm, Noise Level=41 dB(A), Pumping Speed — Ar=250 L/s, Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Pumping Speed — Ar |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10-10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=1.5 x 106, Compression Ratio He=>1 x 108, Compression Ratio N2=>1 x 1011, Cooling Method=Air cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=180.31 mm, Length=174.8 mm, Maximum Gas Throughput — N2, Water Cooling=250 sccm, Noise Level=41 dB(A), Pumping Speed — Ar=250 L/s, Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Pumping Speed — H2 |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10-10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=1.5 x 106, Compression Ratio He=>1 x 108, Compression Ratio N2=>1 x 1011, Cooling Method=Air cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=180.31 mm, Length=174.8 mm, Maximum Gas Throughput — N2, Water Cooling=250 sccm, Noise Level=41 dB(A), Pumping Speed — Ar=250 L/s, Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Pumping Speed — He |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10-10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=1.5 x 106, Compression Ratio He=>1 x 108, Compression Ratio N2=>1 x 1011, Cooling Method=Air cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=180.31 mm, Length=174.8 mm, Maximum Gas Throughput — N2, Water Cooling=250 sccm, Noise Level=41 dB(A), Pumping Speed — Ar=250 L/s, Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Pumping Speed — N2 |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10-10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=1.5 x 106, Compression Ratio He=>1 x 108, Compression Ratio N2=>1 x 1011, Cooling Method=Air cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=180.31 mm, Length=174.8 mm, Maximum Gas Throughput — N2, Water Cooling=250 sccm, Noise Level=41 dB(A), Pumping Speed — Ar=250 L/s, Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Standards and Certifications |
- EN 61010-1
EN 61326-1 EN 1012-2 EN 12100 EN 50581 Machinery Directive 2006/42/EC Electromagnetic Compatibility Directive 2014/30/ EU Directive 2011/65/EU
<!— Standards and Certifications::EN 61010-1 EN 61326-1 EN 1012-2 EN 12100 EN 50581 Machinery Directive 2006/42/EC Electromagnetic Compatibility Directive 2014/30/ EU Directive 2011/65/EU —>
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10-10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=1.5 x 106, Compression Ratio He=>1 x 108, Compression Ratio N2=>1 x 1011, Cooling Method=Air cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=180.31 mm, Length=174.8 mm, Maximum Gas Throughput — N2, Water Cooling=250 sccm, Noise Level=41 dB(A), Pumping Speed — Ar=250 L/s, Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Weight |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure=<1 x 10-10 mbar, Compression Ratio Ar=>1 x 1011, Compression Ratio H2=1.5 x 106, Compression Ratio He=>1 x 108, Compression Ratio N2=>1 x 1011, Cooling Method=Air cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=180.31 mm, Length=174.8 mm, Maximum Gas Throughput — N2, Water Cooling=250 sccm, Noise Level=41 dB(A), Pumping Speed — Ar=250 L/s, Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Width |
|
<!—
—>