<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine= 1 x 10-10 Torr| 1 x 10-10 mbar|, Compression Ratio H2=2 x 104, Compression Ratio He=1 x 105, Compression Ratio N2=2 x 108, Cooling Method=Water cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=189.87 mm, Length=174.80 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=
380 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Ambient Operating Temperature |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine= 1 x 10-10 Torr| 1 x 10-10 mbar|, Compression Ratio H2=2 x 104, Compression Ratio He=1 x 105, Compression Ratio N2=2 x 108, Cooling Method=Water cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=189.87 mm, Length=174.80 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=
380 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Ambient Storage Temperature |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine= 1 x 10-10 Torr| 1 x 10-10 mbar|, Compression Ratio H2=2 x 104, Compression Ratio He=1 x 105, Compression Ratio N2=2 x 108, Cooling Method=Water cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=189.87 mm, Length=174.80 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=
380 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
Base Pressure |
<!— "inside MultiLine 1 value": 1 x 10-10 Torr| 1 x 10-10 mbar|—>
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine= 1 x 10-10 Torr| 1 x 10-10 mbar|, Compression Ratio H2=2 x 104, Compression Ratio He=1 x 105, Compression Ratio N2=2 x 108, Cooling Method=Water cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=189.87 mm, Length=174.80 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=
380 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Compression Ratio H2 |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine= 1 x 10-10 Torr| 1 x 10-10 mbar|, Compression Ratio H2=2 x 104, Compression Ratio He=1 x 105, Compression Ratio N2=2 x 108, Cooling Method=Water cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=189.87 mm, Length=174.80 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=
380 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Compression Ratio He |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine= 1 x 10-10 Torr| 1 x 10-10 mbar|, Compression Ratio H2=2 x 104, Compression Ratio He=1 x 105, Compression Ratio N2=2 x 108, Cooling Method=Water cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=189.87 mm, Length=174.80 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=
380 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Compression Ratio N2 |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine= 1 x 10-10 Torr| 1 x 10-10 mbar|, Compression Ratio H2=2 x 104, Compression Ratio He=1 x 105, Compression Ratio N2=2 x 108, Cooling Method=Water cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=189.87 mm, Length=174.80 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=
380 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Cooling Method |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine= 1 x 10-10 Torr| 1 x 10-10 mbar|, Compression Ratio H2=2 x 104, Compression Ratio He=1 x 105, Compression Ratio N2=2 x 108, Cooling Method=Water cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=189.87 mm, Length=174.80 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=
380 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Flange Type |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine= 1 x 10-10 Torr| 1 x 10-10 mbar|, Compression Ratio H2=2 x 104, Compression Ratio He=1 x 105, Compression Ratio N2=2 x 108, Cooling Method=Water cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=189.87 mm, Length=174.80 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=
380 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Foreline Flange Size |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine= 1 x 10-10 Torr| 1 x 10-10 mbar|, Compression Ratio H2=2 x 104, Compression Ratio He=1 x 105, Compression Ratio N2=2 x 108, Cooling Method=Water cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=189.87 mm, Length=174.80 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=
380 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Height |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine= 1 x 10-10 Torr| 1 x 10-10 mbar|, Compression Ratio H2=2 x 104, Compression Ratio He=1 x 105, Compression Ratio N2=2 x 108, Cooling Method=Water cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=189.87 mm, Length=174.80 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=
380 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Length |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine= 1 x 10-10 Torr| 1 x 10-10 mbar|, Compression Ratio H2=2 x 104, Compression Ratio He=1 x 105, Compression Ratio N2=2 x 108, Cooling Method=Water cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=189.87 mm, Length=174.80 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=
380 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Maximum Gas Throughput — He, Water Cooling |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine= 1 x 10-10 Torr| 1 x 10-10 mbar|, Compression Ratio H2=2 x 104, Compression Ratio He=1 x 105, Compression Ratio N2=2 x 108, Cooling Method=Water cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=189.87 mm, Length=174.80 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=
380 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Maximum Gas Throughput — N2, Water Cooling |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine= 1 x 10-10 Torr| 1 x 10-10 mbar|, Compression Ratio H2=2 x 104, Compression Ratio He=1 x 105, Compression Ratio N2=2 x 108, Cooling Method=Water cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=189.87 mm, Length=174.80 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=
380 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Noise Level |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine= 1 x 10-10 Torr| 1 x 10-10 mbar|, Compression Ratio H2=2 x 104, Compression Ratio He=1 x 105, Compression Ratio N2=2 x 108, Cooling Method=Water cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=189.87 mm, Length=174.80 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=
380 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Pumping Speed — H2 |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine= 1 x 10-10 Torr| 1 x 10-10 mbar|, Compression Ratio H2=2 x 104, Compression Ratio He=1 x 105, Compression Ratio N2=2 x 108, Cooling Method=Water cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=189.87 mm, Length=174.80 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=
380 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Pumping Speed — He |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine= 1 x 10-10 Torr| 1 x 10-10 mbar|, Compression Ratio H2=2 x 104, Compression Ratio He=1 x 105, Compression Ratio N2=2 x 108, Cooling Method=Water cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=189.87 mm, Length=174.80 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=
380 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Pumping Speed — N2 |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine= 1 x 10-10 Torr| 1 x 10-10 mbar|, Compression Ratio H2=2 x 104, Compression Ratio He=1 x 105, Compression Ratio N2=2 x 108, Cooling Method=Water cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=189.87 mm, Length=174.80 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=
380 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Standards and Certifications |
- EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine= 1 x 10-10 Torr| 1 x 10-10 mbar|, Compression Ratio H2=2 x 104, Compression Ratio He=1 x 105, Compression Ratio N2=2 x 108, Cooling Method=Water cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=189.87 mm, Length=174.80 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=
380 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Weight |
|
<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine= 1 x 10-10 Torr| 1 x 10-10 mbar|, Compression Ratio H2=2 x 104, Compression Ratio He=1 x 105, Compression Ratio N2=2 x 108, Cooling Method=Water cooling, Flange Type=ISO 160 K, Foreline Flange Size=KF 16 NW, Height=189.87 mm, Length=174.80 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=
380 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1
EN 61326-1
EN 1012-2
EN 12100
EN 50581
Machinery Directive 2006/42/EC
Electromagnetic Compatibility Directive 2014/30/
EU Directive 2011/65/EU, Weight=6.18 kg, Width=144 mm}—>
| Width |
|
<!—
—>