X3513-64067

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine=< 1 x 10^-10 Torr|< 1 x 10^-10 mbar|, Compression Ratio H2=2 x 10⁴, Compression Ratio He=1 x 10⁵, Compression Ratio N2=2 x 10⁸, Cooling Method=Air cooling, Flange Type=ISO 100 K, Foreline Flange Size=KF 16 NW, Height=205.05 mm, Length=144 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=450 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1 EN 61326-1 EN 1012-2 EN 12100 EN 50581 Machinery Directive 2006/42/EC Electromagnetic Compatibility Directive 2014/30/ EU Directive 2011/65/EU, Weight=5.84 kg, Width=144 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine=< 1 x 10^-10 Torr|< 1 x 10^-10 mbar|, Compression Ratio H2=2 x 10⁴, Compression Ratio He=1 x 10⁵, Compression Ratio N2=2 x 10⁸, Cooling Method=Air cooling, Flange Type=ISO 100 K, Foreline Flange Size=KF 16 NW, Height=205.05 mm, Length=144 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=450 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1 EN 61326-1 EN 1012-2 EN 12100 EN 50581 Machinery Directive 2006/42/EC Electromagnetic Compatibility Directive 2014/30/ EU Directive 2011/65/EU, Weight=5.84 kg, Width=144 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine=< 1 x 10^-10 Torr|< 1 x 10^-10 mbar|, Compression Ratio H2=2 x 10⁴, Compression Ratio He=1 x 10⁵, Compression Ratio N2=2 x 10⁸, Cooling Method=Air cooling, Flange Type=ISO 100 K, Foreline Flange Size=KF 16 NW, Height=205.05 mm, Length=144 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=450 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1 EN 61326-1 EN 1012-2 EN 12100 EN 50581 Machinery Directive 2006/42/EC Electromagnetic Compatibility Directive 2014/30/ EU Directive 2011/65/EU, Weight=5.84 kg, Width=144 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine=< 1 x 10^-10 Torr|< 1 x 10^-10 mbar|, Compression Ratio H2=2 x 10⁴, Compression Ratio He=1 x 10⁵, Compression Ratio N2=2 x 10⁸, Cooling Method=Air cooling, Flange Type=ISO 100 K, Foreline Flange Size=KF 16 NW, Height=205.05 mm, Length=144 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=450 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1 EN 61326-1 EN 1012-2 EN 12100 EN 50581 Machinery Directive 2006/42/EC Electromagnetic Compatibility Directive 2014/30/ EU Directive 2011/65/EU, Weight=5.84 kg, Width=144 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine=< 1 x 10^-10 Torr|< 1 x 10^-10 mbar|, Compression Ratio H2=2 x 10⁴, Compression Ratio He=1 x 10⁵, Compression Ratio N2=2 x 10⁸, Cooling Method=Air cooling, Flange Type=ISO 100 K, Foreline Flange Size=KF 16 NW, Height=205.05 mm, Length=144 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=450 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1 EN 61326-1 EN 1012-2 EN 12100 EN 50581 Machinery Directive 2006/42/EC Electromagnetic Compatibility Directive 2014/30/ EU Directive 2011/65/EU, Weight=5.84 kg, Width=144 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine=< 1 x 10^-10 Torr|< 1 x 10^-10 mbar|, Compression Ratio H2=2 x 10⁴, Compression Ratio He=1 x 10⁵, Compression Ratio N2=2 x 10⁸, Cooling Method=Air cooling, Flange Type=ISO 100 K, Foreline Flange Size=KF 16 NW, Height=205.05 mm, Length=144 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=450 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1 EN 61326-1 EN 1012-2 EN 12100 EN 50581 Machinery Directive 2006/42/EC Electromagnetic Compatibility Directive 2014/30/ EU Directive 2011/65/EU, Weight=5.84 kg, Width=144 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine=< 1 x 10^-10 Torr|< 1 x 10^-10 mbar|, Compression Ratio H2=2 x 10⁴, Compression Ratio He=1 x 10⁵, Compression Ratio N2=2 x 10⁸, Cooling Method=Air cooling, Flange Type=ISO 100 K, Foreline Flange Size=KF 16 NW, Height=205.05 mm, Length=144 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=450 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1 EN 61326-1 EN 1012-2 EN 12100 EN 50581 Machinery Directive 2006/42/EC Electromagnetic Compatibility Directive 2014/30/ EU Directive 2011/65/EU, Weight=5.84 kg, Width=144 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine=< 1 x 10^-10 Torr|< 1 x 10^-10 mbar|, Compression Ratio H2=2 x 10⁴, Compression Ratio He=1 x 10⁵, Compression Ratio N2=2 x 10⁸, Cooling Method=Air cooling, Flange Type=ISO 100 K, Foreline Flange Size=KF 16 NW, Height=205.05 mm, Length=144 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=450 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1 EN 61326-1 EN 1012-2 EN 12100 EN 50581 Machinery Directive 2006/42/EC Electromagnetic Compatibility Directive 2014/30/ EU Directive 2011/65/EU, Weight=5.84 kg, Width=144 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine=< 1 x 10^-10 Torr|< 1 x 10^-10 mbar|, Compression Ratio H2=2 x 10⁴, Compression Ratio He=1 x 10⁵, Compression Ratio N2=2 x 10⁸, Cooling Method=Air cooling, Flange Type=ISO 100 K, Foreline Flange Size=KF 16 NW, Height=205.05 mm, Length=144 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=450 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1 EN 61326-1 EN 1012-2 EN 12100 EN 50581 Machinery Directive 2006/42/EC Electromagnetic Compatibility Directive 2014/30/ EU Directive 2011/65/EU, Weight=5.84 kg, Width=144 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine=< 1 x 10^-10 Torr|< 1 x 10^-10 mbar|, Compression Ratio H2=2 x 10⁴, Compression Ratio He=1 x 10⁵, Compression Ratio N2=2 x 10⁸, Cooling Method=Air cooling, Flange Type=ISO 100 K, Foreline Flange Size=KF 16 NW, Height=205.05 mm, Length=144 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=450 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1 EN 61326-1 EN 1012-2 EN 12100 EN 50581 Machinery Directive 2006/42/EC Electromagnetic Compatibility Directive 2014/30/ EU Directive 2011/65/EU, Weight=5.84 kg, Width=144 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine=< 1 x 10^-10 Torr|< 1 x 10^-10 mbar|, Compression Ratio H2=2 x 10⁴, Compression Ratio He=1 x 10⁵, Compression Ratio N2=2 x 10⁸, Cooling Method=Air cooling, Flange Type=ISO 100 K, Foreline Flange Size=KF 16 NW, Height=205.05 mm, Length=144 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=450 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1 EN 61326-1 EN 1012-2 EN 12100 EN 50581 Machinery Directive 2006/42/EC Electromagnetic Compatibility Directive 2014/30/ EU Directive 2011/65/EU, Weight=5.84 kg, Width=144 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine=< 1 x 10^-10 Torr|< 1 x 10^-10 mbar|, Compression Ratio H2=2 x 10⁴, Compression Ratio He=1 x 10⁵, Compression Ratio N2=2 x 10⁸, Cooling Method=Air cooling, Flange Type=ISO 100 K, Foreline Flange Size=KF 16 NW, Height=205.05 mm, Length=144 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=450 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1 EN 61326-1 EN 1012-2 EN 12100 EN 50581 Machinery Directive 2006/42/EC Electromagnetic Compatibility Directive 2014/30/ EU Directive 2011/65/EU, Weight=5.84 kg, Width=144 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine=< 1 x 10^-10 Torr|< 1 x 10^-10 mbar|, Compression Ratio H2=2 x 10⁴, Compression Ratio He=1 x 10⁵, Compression Ratio N2=2 x 10⁸, Cooling Method=Air cooling, Flange Type=ISO 100 K, Foreline Flange Size=KF 16 NW, Height=205.05 mm, Length=144 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=450 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1 EN 61326-1 EN 1012-2 EN 12100 EN 50581 Machinery Directive 2006/42/EC Electromagnetic Compatibility Directive 2014/30/ EU Directive 2011/65/EU, Weight=5.84 kg, Width=144 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine=< 1 x 10^-10 Torr|< 1 x 10^-10 mbar|, Compression Ratio H2=2 x 10⁴, Compression Ratio He=1 x 10⁵, Compression Ratio N2=2 x 10⁸, Cooling Method=Air cooling, Flange Type=ISO 100 K, Foreline Flange Size=KF 16 NW, Height=205.05 mm, Length=144 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=450 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1 EN 61326-1 EN 1012-2 EN 12100 EN 50581 Machinery Directive 2006/42/EC Electromagnetic Compatibility Directive 2014/30/ EU Directive 2011/65/EU, Weight=5.84 kg, Width=144 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine=< 1 x 10^-10 Torr|< 1 x 10^-10 mbar|, Compression Ratio H2=2 x 10⁴, Compression Ratio He=1 x 10⁵, Compression Ratio N2=2 x 10⁸, Cooling Method=Air cooling, Flange Type=ISO 100 K, Foreline Flange Size=KF 16 NW, Height=205.05 mm, Length=144 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=450 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1 EN 61326-1 EN 1012-2 EN 12100 EN 50581 Machinery Directive 2006/42/EC Electromagnetic Compatibility Directive 2014/30/ EU Directive 2011/65/EU, Weight=5.84 kg, Width=144 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine=< 1 x 10^-10 Torr|< 1 x 10^-10 mbar|, Compression Ratio H2=2 x 10⁴, Compression Ratio He=1 x 10⁵, Compression Ratio N2=2 x 10⁸, Cooling Method=Air cooling, Flange Type=ISO 100 K, Foreline Flange Size=KF 16 NW, Height=205.05 mm, Length=144 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=450 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1 EN 61326-1 EN 1012-2 EN 12100 EN 50581 Machinery Directive 2006/42/EC Electromagnetic Compatibility Directive 2014/30/ EU Directive 2011/65/EU, Weight=5.84 kg, Width=144 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine=< 1 x 10^-10 Torr|< 1 x 10^-10 mbar|, Compression Ratio H2=2 x 10⁴, Compression Ratio He=1 x 10⁵, Compression Ratio N2=2 x 10⁸, Cooling Method=Air cooling, Flange Type=ISO 100 K, Foreline Flange Size=KF 16 NW, Height=205.05 mm, Length=144 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=450 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1 EN 61326-1 EN 1012-2 EN 12100 EN 50581 Machinery Directive 2006/42/EC Electromagnetic Compatibility Directive 2014/30/ EU Directive 2011/65/EU, Weight=5.84 kg, Width=144 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine=< 1 x 10^-10 Torr|< 1 x 10^-10 mbar|, Compression Ratio H2=2 x 10⁴, Compression Ratio He=1 x 10⁵, Compression Ratio N2=2 x 10⁸, Cooling Method=Air cooling, Flange Type=ISO 100 K, Foreline Flange Size=KF 16 NW, Height=205.05 mm, Length=144 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=450 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1 EN 61326-1 EN 1012-2 EN 12100 EN 50581 Machinery Directive 2006/42/EC Electromagnetic Compatibility Directive 2014/30/ EU Directive 2011/65/EU, Weight=5.84 kg, Width=144 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine=< 1 x 10^-10 Torr|< 1 x 10^-10 mbar|, Compression Ratio H2=2 x 10⁴, Compression Ratio He=1 x 10⁵, Compression Ratio N2=2 x 10⁸, Cooling Method=Air cooling, Flange Type=ISO 100 K, Foreline Flange Size=KF 16 NW, Height=205.05 mm, Length=144 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=450 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1 EN 61326-1 EN 1012-2 EN 12100 EN 50581 Machinery Directive 2006/42/EC Electromagnetic Compatibility Directive 2014/30/ EU Directive 2011/65/EU, Weight=5.84 kg, Width=144 mm}—>

<!— "inside defaultSpecification":{Ambient Operating Temperature=+5 to +35 °C, Ambient Storage Temperature=-40 to +70 °C, Base Pressure|MultiLine=< 1 x 10^-10 Torr|< 1 x 10^-10 mbar|, Compression Ratio H2=2 x 10⁴, Compression Ratio He=1 x 10⁵, Compression Ratio N2=2 x 10⁸, Cooling Method=Air cooling, Flange Type=ISO 100 K, Foreline Flange Size=KF 16 NW, Height=205.05 mm, Length=144 mm, Maximum Gas Throughput — He, Water Cooling=500 sccm, Maximum Gas Throughput — N2, Water Cooling=450 sccm, Noise Level=41 dB(A), Pumping Speed — H2=220 L/s, Pumping Speed — He=255 L/s, Pumping Speed — N2=250 L/s, Standards and Certifications=EN 61010-1 EN 61326-1 EN 1012-2 EN 12100 EN 50581 Machinery Directive 2006/42/EC Electromagnetic Compatibility Directive 2014/30/ EU Directive 2011/65/EU, Weight=5.84 kg, Width=144 mm}—>

<!—

—>

Ambient Operating Temperature	+5 to +35 °C
Ambient Storage Temperature	-40 to +70 °C
Base Pressure	<!— "inside MultiLine 1 value":< 1 x 10-10 Torr|< 1 x 10-10 mbar|—> <!— "multilineKeyVal pipe value":< 1 x 10-10 Torr < 1 x 10-10 mbar —> < 1 x 10-10 Torr < 1 x 10-10 mbar <!— Base Pressure|MultiLine::< 1 x 10-10 Torr|< 1 x 10-10 mbar| —>
Compression Ratio H2	2 x 104 <!— Compression Ratio H2::2 x 104 —>
Compression Ratio He	1 x 105 <!— Compression Ratio He::1 x 105 —>
Compression Ratio N2	2 x 108 <!— Compression Ratio N2::2 x 108 —>
Cooling Method	Air cooling
Flange Type	ISO 100 K
Foreline Flange Size	KF 16 NW
Height	205.05 mm
Length	144 mm
Maximum Gas Throughput — He, Water Cooling	500 sccm
Maximum Gas Throughput — N2, Water Cooling	450 sccm
Noise Level	41 dB(A)
Pumping Speed — H2	220 L/s
Pumping Speed — He	255 L/s
Pumping Speed — N2	250 L/s
Standards and Certifications	EN 61010-1 EN 61326-1 EN 1012-2 EN 12100 EN 50581 Machinery Directive 2006/42/EC Electromagnetic Compatibility Directive 2014/30/ EU Directive 2011/65/EU <!— Standards and Certifications::EN 61010-1 EN 61326-1 EN 1012-2 EN 12100 EN 50581 Machinery Directive 2006/42/EC Electromagnetic Compatibility Directive 2014/30/ EU Directive 2011/65/EU —>
Weight	5.84 kg
Width	144 mm